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비쥬얼

Products

Specification

Product Name

Silicon Ring

Material

Single Crystal Silicon

Multi Crystal Silicon

Purity(%)

Single Crystal Silicon ( 8N 99.999999% )

Multi Crystal Silicon ( 5N 99.999%)

Applications

Dry etcher process

Out Dia

520mm ( max )

Thickness (Flatness)

1~70mm ( <15㎛ )

Res. ( Ω.㎝ )

Low: < 0.02 Middle : 1~5 High 60~90

Surface Condition

Polishing

Lapping

Grinding

Quality ( Visual )

Chipping

Scratch

Crack

Stain Free

Quality ( Cleaning Process )

100 ppb or less per element ( Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, Zn, and Y )

Surface Quality

  • By ensuring the processing capability is in the best quality condition and has appropriate etching, damage to the product surface is removed.

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Specification

Product Name

Silicon SHOWER HEAD

Material

Single Crystal Silicon

Purity(%)

Single Crystal Silicon ( 8N 99.999999% )

Applications

Dry etcher process

Out Dia

440mm ( max )

Thickness (Flatness)

1 ~ 15mm ( <15㎛ )

Res. ( Ω.㎝ )

Low: < 0.02 Middle : 1~5 High 60~90

Gas Hole

Diameter 0.3~1.0mm

Roundness < 0.05mm

Concentricity < 0.05mm

Δ XY-Position < 0.05mm

Surface Condition

Polishing

Lapping

Grinding

Quality ( Visual )

Chipping

Scratch

Crack

Stain Free

Quality ( Cleaning Process )

100 ppb or less per element ( Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, Zn, and Y )

Gas Hole Quality ( Micro Scope )

The quality inside holes is guaranteed through the use ofan appropriate processing method.

Gas Hole Quality (Damage of Depth)

Any damage generated inside holes is removed through an appropriate processing method and proper etching.

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