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비쥬얼

Products

Meterial BC ( Boron carbide ceramics )
Purity >99.9%
Density (g/cm3) 2.52 g/㎠
Flexural Strength (Mpa) >400~650 Mpa
Hardness (kg/mm2) >3500
Resistivity (Ohm·㎝) <0.5
coefficient of expansion (x10-6/℃) 4.5

Specification

Product Name

Ring

SHOWER HEAD

Meterial

BC ( Boron carbide ceramics )

Purity(%)

> 99.9 %

Applications

Dry etcher process

Out Dia

360mm

Thickness (Flatness)

20mm

Res. ( Ω.㎝ )

Diameter 0.3~0.7mm

Roundness < 0.05mm

Concentricity < 0.05mm

Δ XY-Position < 0.05mm

Surface Condition

Grinding

Quality ( Visual )

Chipping

Scratch

Crack

Stain Free

Quality ( Cleaning Process )

100 ppb or less per element (Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, Zn, and Y)