비쥬얼
제품정보
제품정보
BC (Boron carbide ceramics)
| Meterial | BC ( Boron carbide ceramics ) |
|---|---|
| Purity | >99.9% |
| Density (g/cm3) | 2.52 g/㎠ |
| Flexural Strength (Mpa) | >400~650 Mpa |
| Hardness (kg/mm2) | >3500 |
| Resistivity (Ohm·㎝) | <0.5 |
| coefficient of expansion (x10-6/℃) | 4.5 |
Specification
| Product Name | Ring |
SHOWER HEAD |
|---|---|---|
| Meterial | BC ( Boron carbide ceramics ) |
|
| Purity(%) | > 99.9 % |
|
| Applications | Dry etcher process |
|
| Out Dia | 360mm |
|
| Thickness (Flatness) | 20mm |
|
| Res. ( Ω.㎝ ) | Diameter 0.3~0.7mm |
|
Roundness < 0.05mm |
||
Concentricity < 0.05mm |
||
Δ XY-Position < 0.05mm |
||
| Surface Condition | Grinding |
|
| Quality ( Visual ) | Chipping |
|
Scratch |
||
Crack |
||
Stain Free |
||
| Quality ( Cleaning Process ) | 원소 당 100ppb 이하 ( Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, Zn, Y ) |
|