비쥬얼
제품정보
제품정보
Al (Aluminum)
Specification
| Product Name | Cooling Plate |
|
|---|---|---|
| Meterial | Aluminum |
|
| Applications | Dry etcher process |
|
| Out Diameter Size (mm) | 500mm ( max ) |
|
| Thickness (Flatness) | 50mm ( max ) |
|
| Gas Hole | Roundness < 0.05mm |
|
Concentricity < 0.05mm |
||
Δ XY-Position < 0.05mm |
||
| Surface Condition | Anodizing |
|
Chipping |
||
Scratch |
||
Crack |
||
Stain Free |
||
| Quality ( Cleaning Process ) | 원소 당 100ppb 이하 ( Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, Zn, Y ) |
|